We've developed several unique recipes for an ESI 5330 UV Laser uVia Drill that ESI has graciously placed in our facility for our use. We use it to pattern microchannels and micronozzles in polymers and metals. The tool accommodates sheets and thin plates as large as 18"x18".
This image is of a microfluidic chip machined using ESI 5330:
Following is a read out of blind cut microchannel depth characterization data: